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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6360535(A)
申请公布日期
1988.03.16
申请号
JP19860204961
申请日期
1986.08.30
申请人
SHARP CORP
发明人
KUWATA TORU
分类号
H01L21/28;H01L21/306
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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