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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS6360532(A)
申请公布日期
1988.03.16
申请号
JP19860203715
申请日期
1986.09.01
申请人
HITACHI LTD;HITACHI HARAMACHI SEMICONDUCTOR LTD
发明人
OWADA NOBUHITO;MOCHIZUKI YASUHIRO
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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