Method for selective intermixing of layered structures composed of thin solid films

摘要

A multilayer structure formed of two or more separate layers of different materials can be selectively intermixed so as to become compositionally transmuted, such that the distinction between the different original materials is lost, at least partially. This intermixing is accomplished by employing irradiation with a pulsed or rapidly scanned laser or electron beam. In addition,the intermixing can be accomplised by multiple pulses from the laser or electron beam so as to increase the degree of intermixing, thereby obtaining a more complete mixing.