发明名称 Electronic device including a thin film transistor
摘要 Short channel thin film transistors suffer from unacceptably high leakage currents. The invention provides an electronic device including a thin film transistor in which the length (20) of the channel of the transistor is 1 mum or less, and the mobility of the semiconductor material in the channel is less than 0.2 cm2/Vs. The selection of a low mobility semiconductor material results in acceptable off-current characteristics and its effect on the switching speed of the device is compensated for by the short channel length (20) of the device.
申请公布号 US2002167051(A1) 申请公布日期 2002.11.14
申请号 US20020142619 申请日期 2002.05.09
申请人 KONINKLIJKE PHILIPS ELECTRONIC N.V. 发明人 DEANE STEVEN C.;VAN DER ZAAG PIETER J.;BATTERSBY STEPHEN J.
分类号 H01L29/786;(IPC1-7):H01L27/01 主分类号 H01L29/786
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