发明名称 |
Electronic device including a thin film transistor |
摘要 |
Short channel thin film transistors suffer from unacceptably high leakage currents. The invention provides an electronic device including a thin film transistor in which the length (20) of the channel of the transistor is 1 mum or less, and the mobility of the semiconductor material in the channel is less than 0.2 cm2/Vs. The selection of a low mobility semiconductor material results in acceptable off-current characteristics and its effect on the switching speed of the device is compensated for by the short channel length (20) of the device.
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申请公布号 |
US2002167051(A1) |
申请公布日期 |
2002.11.14 |
申请号 |
US20020142619 |
申请日期 |
2002.05.09 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONIC N.V. |
发明人 |
DEANE STEVEN C.;VAN DER ZAAG PIETER J.;BATTERSBY STEPHEN J. |
分类号 |
H01L29/786;(IPC1-7):H01L27/01 |
主分类号 |
H01L29/786 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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