| 摘要 |
PURPOSE:To prevent erroenous insertion by mounting a member with a pectinate projecting section, which is not brought into contact with a wafer when the wafer is inserted normally into a cassette and is brought into contact with the wafer and conducts the operation of the obstruction of insertion when the wafer is inserted erroneously under the state of double levels. CONSTITUTION:When wafers are inserted normally, all the wafers 3a are stored in a cassette because the wafers 3a are introduced into grooves 5 in a member 2. When the wafers are inserted erroneously at double levels, the wafers 3b are not admitted into the grooves 5 in the member 2 and collide with the nose sections of projections, and the wafers 3b are exposed outside the cassette 1. Consequently, the wafers projecting outside the cassette can be discriminated as erroneous insertion. Accordingly, the confirmation of the presence of erroneous insertion and the specification of the erroneously inserted wafers are enabled and facilitated. |
