| 摘要 |
PURPOSE:To eliminate the need for a large-sized and costly device by coating a soln. of a resin hardly soluble in an org. solvent on a 1st photoresist layer and curing the same by heating to form an intermediate resin layer. CONSTITUTION:The intermediate resin layer 4' is provided as a thin film for partition to prevent the attack of the 1st photoresist layer 2 by the org. solvent of the 2nd photoresist layer 3 at the time of coating the 2nd photoresist layer 3 on the 1st photoresist layer 2. PVA is used as the resin layer having the substantial light transparency to prevent the shielding of laser light in order to inscribe guide groove parts and preaddress pit parts; for example, polymers such as polyacrylamide and methyl cellulose are also usable as the intermediate resin layer 4'. since the polymer is soluble in water, the thin film is easily formable by spin coating of such resin soln.
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