| 摘要 |
PURPOSE:To shorten an arithmetic processing time necessary to detect an additional defect and a lacking defect by executing the logical operation of a brightness inverted image and an image to be inspected after the necessary quantity of the image of a normal object to be inspected is expanded or reduced. CONSTITUTION:First, after the necessary quantity of the image of a normal object to be inspected is expanded, the AND of a first comparing image 4 obtained by brightness-inverting and an image to be inspected 1 is obtained by an AND circuit 6 and an additional defect 2a is inspected by a bright pattern in an AND image 9. After the necessary quantity of the image of the normal object to be inspected is reduced, the OR of a second comparing image 5 obtained by the brightness-inverting and the image to be inspected image 1 is obtained by an OR computing element 7 and a lacking defect 3a is detected by the bright pattern in an OR image 11. The exclusive OR of the AND image 9 and the OR image 11 is obtained by an exclusive OR computing element 8, and then, both an additional defect 2b and the lacking defect 3a are displayed by a dark pattern on one picture 12. |
