| 摘要 |
FIELD: electronic industry; p methods of synthesis of ceramics. ^ SUBSTANCE: the invention is pertaining to the field of electronic industry, in particular, to the method of synthesis of ceramics intended for manufacture of the ceramics used as the targets at the magnetron, electron-beam and other methods of sputtering in the microelectronics, optoelectronics and the nanoelectronics. The method of synthesis of the ceramics provides for deposition on the surface of basic component powder of the layer of the alloying metal by grinding of the components mixture at the fusion point of the alloying metal, the mold pressing and the products agglomeration. The technical result of the invention is reduction of friction between the particles at the press-molding, the more even distribution of the alloying dopant along the volume of the ceramics, and also formation on the grain boundary of the low temperature phase improving conditions of agglomeration. ^ EFFECT: the invention ensures reduction of friction between the particles at the press-molding, the more even distribution of the alloying dopant along the volume of the ceramics, formation on the grain boundary of the low temperature phase improving conditions of agglomeration. ^ 3 cl, 2 ex |
