| 摘要 |
PURPOSE:To achieve pellet bonding with a high alignment accuracy by a method wherein a bonding position is automatically detected and a deviation from a reference position is calculated and the discrepancy of the position of a pellet from the reference position is automatically corrected in accordance with the deviation. CONSTITUTION:A lead frame 16 is intermittently shifted by a shifting pin 17 and a pellet 11 is bonded to the lead frame while in the stoppage period of the shifting. The lead frame 16 is intermittently shifted and, while it is staying at the position beneath an ITV 18, the relative position of the pellet 11 on the lead frame is detected and the deviation of the relative position from the reference position on the lead frame is calculated by an information processor 19. In accordance with the deviation, driving motors 14a and 14b are controlled and 1st predetermined position of the pellet on a table 12 is corrected and then 2nd predetermined position of the pellet transferred by an attracting collet 15 is automatically controlled so as to coincide with the reference position. |
