| 发明名称 |
INTEGRERT KRETS TIL BRUK I FORBINDELSE MED PRODUKSJONSPROSESSER. |
| 摘要 |
A process is disclosed for manufacturing an integrated circuit in which multiple patterned layers of thin film materials are provided on a silicon wafer. The wafer is conditioned between the providing of layers, after each etching step, by rinsing the item with a purified water solution containing at least .01 ppm ozone, preferably between .02 and .09 ppm ozone. |
| 申请公布号 |
NO873670(A) |
申请公布日期 |
1988.03.03 |
| 申请号 |
NO19870003670 |
申请日期 |
1987.09.01 |
| 申请人 |
ARROWHEAD INDUSTRIAL WATER INC;MONSANTO COMPANY |
发明人 |
TREMONT, PETER L.;ACKERMANN, ARTHUR J. |
| 分类号 |
H01L21/02;H01L21/306;H01L21/311;H01L21/316;H01L21/321;H01L21/762;(IPC1-7):H01L/ |
主分类号 |
H01L21/02 |
| 代理机构 |
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