APPARATUS AND INSTALLATION FOR THE WET PROCESSING OF PLANAR SUBSTRATES,申请号EP19840401133-传众专利搜索

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发明名称	APPARATUS AND INSTALLATION FOR THE WET PROCESSING OF PLANAR SUBSTRATES
摘要
申请公布号	EP0130866(B1)	申请公布日期	1988.03.02
申请号	EP19840401133	申请日期	1984.06.05
申请人	FUJITSU LIMITED	发明人	OHKUMA, YUJI
分类号	C23F1/08;H01L21/306;(IPC1-7):H01L21/306;H01L21/68	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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