| 摘要 |
PCT No. PCT/EP85/00275 Sec. 371 Date Dec. 13, 1985 Sec. 102(e) Date Dec. 13, 1985 PCT Filed Jun. 7, 1985 PCT Pub. No. WO86/00093 PCT Pub. Date Jan. 3, 1986.Diamond-like, transparent, clear and uncolored carbon coatings with low internal stresses are generated on substrates by plasma discharge from the gas phase. For this purpose, a hydrocarbon gas or a mixture of hydrocarbon gases and pure hydrogen is admitted onto the substrate to be coated which is at room temperature. Around the substrate an oxygen-free plasma discharge is produced by high-frequency excitation which is sustained by the gases admitted. The gases are excited, dissociated ionized and accelerated toward the substrate during plasma discharge.
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