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经营范围
发明名称
THIN-FILM DEPOSITING METHOD
摘要
申请公布号
JPS6348847(A)
申请公布日期
1988.03.01
申请号
JP19860192022
申请日期
1986.08.19
申请人
TOSHIBA CORP
发明人
ARIKADO TSUNETOSHI
分类号
H01L21/316;H01L21/31;H01L21/768
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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