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发明名称
DRY ETCHING
摘要
申请公布号
JPS6348829(A)
申请公布日期
1988.03.01
申请号
JP19860192021
申请日期
1986.08.19
申请人
TOSHIBA CORP
发明人
SEKINE MAKOTO;OKANO HARUO
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
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