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发明名称
PROCEDE DE DIMINUTION DE LA RUGOSITE D'UNE COUCHE EPAISSE D'ISOLANT
摘要
申请公布号
FR2888663(B1)
申请公布日期
2008.04.18
申请号
FR20050007573
申请日期
2005.07.13
申请人
S.O.I.TEC SILICON ON INSULATOR TECHNOLOGIES SOCIETE ANONYME
发明人
DAVAL NICOLAS;KERDILES SEBASTIEN;AULNETTE CECILE
分类号
H01L21/3105;H01L21/762
主分类号
H01L21/3105
代理机构
代理人
主权项
地址
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