CHARGED BEAM LITHOGRAPY DEVICE,申请号JP19860191251-传众专利搜索

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发明名称	CHARGED BEAM LITHOGRAPY DEVICE
摘要
申请公布号	JPS6346729(A)	申请公布日期	1988.02.27
申请号	JP19860191251	申请日期	1986.08.15
申请人	TOSHIBA CORP	发明人	WADA KANJI
分类号	H01L21/027;H01L21/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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