PRODUCTION OF THIN DIELECTRIC FILM,申请号JP19860188926-传众专利搜索

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发明名称	PRODUCTION OF THIN DIELECTRIC FILM
摘要
申请公布号	JPS6345369(A)	申请公布日期	1988.02.26
申请号	JP19860188926	申请日期	1986.08.12
申请人	SEIKO EPSON CORP	发明人	SUGIMOTO MAMORU
分类号	C23C14/40;G11B11/10;G11B11/105	主分类号	C23C14/40
代理机构		代理人
主权项
地址

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