| 摘要 |
PURPOSE:To prevent the damage on wafers while conveyed by a method wherein a wafer press-plate of elastic structure is attached to the frame body in which the wafer is housed, and the clatter of the wafer in a housing jig can be removed. CONSTITUTION:A frame body 3 is constructed by connecting a plurality of cylindrical quartz members using a means such as welding and the like. The part surrounded by the frame body 3 forms the housing space A wafers 2, and the wafer 2 is inserted into the wafer supporting groove 6 bored on the side of the space of the quartz member. An inserting groove 7 is formed on both outside parts in the longitudinal direction of the frame body 3, and the tip of the arm 5a of a handle 5 is inserted into the groove 7. A press-plate 4 consisting of fluororesin is attached to the part located in the middle of the arm 5a, and a wafer 2 is fixed in the wafer supporting groove 6 by the elasticity of the press-plate 4. As a result, the wafers are prevented from being clattered, and the damage generating while the wafers are conveyed can also be prevented. |
