,申请号JP19860118341U-传众专利搜索

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发明名称
摘要
申请公布号	JPS6324828(U)	申请公布日期	1988.02.18
申请号	JP19860118341U	申请日期	1986.07.31
申请人		发明人
分类号	C23F1/08;B08B3/02;B08B3/10;G01F23/16;H01L21/027;H01L21/30;H01L21/306;H01L21/67;H01L21/68;(IPC1-7):H01L21/306	主分类号	C23F1/08
代理机构		代理人
主权项
地址

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