| 摘要 |
PURPOSE:To form a layer insulating film without limiting its material to phosphorus glass and requiring treatment at a high temperature by forming both a boundary stepped section and a stepped section shaped by an opening section by flat surfaces with approximately equal predetermined angles of inclination. CONSTITUTION:Metallic wiring 23, 23' are formed to the upper surface of a thermal oxide film 22. A stepped layer insulated film 24 is shaped so as to coat the upper sections of the metallic wiring 23, 23' and another thermal oxide film 22. Metallic wiring 26 is molded onto the layer insulating film 24, and connected electrically to the metallic wiring 23 through the opening section 25 formed to the layer insulating film 24. In this case, the stepped sections 28, 28', 28'' of the surface of the layer insulating film 24 generated among the upper sections of the metallic wiring 23, 23' and the upper section of another thermal oxide film 22 and the stepped section 27 of the opening section 25 shaped to the layer insulating film 24 are formed by the approximately flat surfaces with the approximately predetermined angles of inclination. |
