发明名称 Sealable transportable container having a particle filtering system
摘要 A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.
申请公布号 US4724874(A) 申请公布日期 1988.02.16
申请号 US19860840380 申请日期 1986.05.01
申请人 ASYST TECHNOLOGIES 发明人 PARIKH, MIHIR;BONORA, ANTHONY C.
分类号 H01L21/677;(IPC1-7):B65B1/04 主分类号 H01L21/677
代理机构 代理人
主权项
地址