发明名称 |
Sealable transportable container having a particle filtering system |
摘要 |
A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.
|
申请公布号 |
US4724874(A) |
申请公布日期 |
1988.02.16 |
申请号 |
US19860840380 |
申请日期 |
1986.05.01 |
申请人 |
ASYST TECHNOLOGIES |
发明人 |
PARIKH, MIHIR;BONORA, ANTHONY C. |
分类号 |
H01L21/677;(IPC1-7):B65B1/04 |
主分类号 |
H01L21/677 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|