发明名称 PROCEDIMIENTO PRA LA OBTENCION DE ACETALES O CETALES CICLICOS DE BETA-CETOESTERES O -AMIDAS.
摘要 <p>Compounds of formula I <IMAGE> (I) in conjunction with compounds that donate acid when exposed to actinic radiation, are suitable for use as positive photoresists. In formula I, R1 and R2 are hydrogen, alkyl, aryl, cycloalkyl, aralkyl or alkaryl, R3 to R8 are hydrogen or lower alkyl, X is -O- or -NR9-, where R9 is hydrogen or C1-C4alkyl n is 0 or 1, m is 2, 3 or 4 and Q is an organic radical of valency m. The photoresists are suitable for making printing formes, printed circuits, integrated circuits or silver-free photographic films.</p>
申请公布号 ES557671(D0) 申请公布日期 1988.02.16
申请号 ES19550007671 申请日期 1987.08.14
申请人 CIBA-GEIGY AG. 发明人
分类号 C07D317/30;C07D319/06;G03C1/72;G03F7/004;G03F7/022;G03F7/039;H01L21/027;H01L21/30;(IPC1-7):C07D319/06;G03C1/10 主分类号 C07D317/30
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