| 摘要 |
PURPOSE:To reduce power consumption at an auxiliary discharge electrode, by constituting the auxiliary discharge electrode in a section filled with fiber state metal through a high-voltage feeding line, which feeds an AC voltage. CONSTITUTION:A high AC voltage is applied to a high-voltage feeding line 7b and fed to fiber state metal 7c through a thin metal wire 7g. Silent discharge is generated between facing anode and cathode through a tube 7a, so that the discharge works as a preliminary ionization discharge voltage, which expedites the implementation of 1 high density and homegeneity in the DC discharge. At this time, the resistance value of the thin wire 7g is negligibly small, and the resistance values between the feeding line 7b and the metal 7c are approximately equal at any point in the metal 7c and several OMEGA or less. Therefore the power consumption in a dielectric electrode and the accompanied internal heating can be reduced. |
