| 摘要 |
<p>PURPOSE:To contrive reducing the contamination of an object to be carried by the generation of dust by sending the object to a definite direction relaying in sequence between different phase supporting rods wherein a plurality of groups of the supporting rods move circularly in a different phase and the uppermost supporting rods support and move forward the object to be carried. CONSTITUTION:Three groups of supporting rods connected to follow the rotation of a crankshaft for an object to be carried are mounted between cranks 4a-4c and 5a-5c corresponding to the crankshafts 4 and 5. Accordingly, these supporting rods move forward and backward together with upward and downward in a 120 deg. different phase by the rotations of the crankshafts 4 and 5. The object 1 to be carried such as a semiconductor substrate or a semiconductor substrate container, etc. is relayed in sequence from the uppermost supporting rods 6-a-1 and 6-a-2 to the coming next uppermost supporting rods 6-b-1 and 6-b-2 and further from the supporting rods 6-b-1 and 6-b-2 to the supporting rods 6-c-1 and 6-c-2 and is carried to the direction shown by an arrow A. This can reduce the contamination of the object to be carried.</p> |
