METHOD FOR OPENING AND CLOSING SHUTTER FOR CONTROLLING PLASMA FLOW,申请号JP19860176014-传众专利搜索

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发明名称	METHOD FOR OPENING AND CLOSING SHUTTER FOR CONTROLLING PLASMA FLOW
摘要
申请公布号	JPS6333574(A)	申请公布日期	1988.02.13
申请号	JP19860176014	申请日期	1986.07.25
申请人	NEC CORP	发明人	INOUE TAKAAKI
分类号	H01L21/205;C23C16/34;C23C16/50;C23C16/511;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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