| 摘要 |
PURPOSE:To enhance the max. intensity of regeneration beam free from regeneration deteriorating phenomenon and to improve a bubble shape so as to make it possible to enhance density, by differentiating the content of the hydrocarbon component of a recording layer in the thickness direction thereof. CONSTITUTION:An optical information recording medium is constituted by forming a first layer 11 on a substrate 10 by the sputtering of an In-CH4-O2 system reduced in hydrocarbon content and forming a second layer 12 on the first layer 11 by the sputtering of an In-CH4-O2 system high in hydrocarbon content. The first layer 11 is formed on the substrate 10 in a thickness of 15nm by setting the flow rate of CH4 to 10SCCM and setting that of O2 to 10SCCM and, subsequently, the second layer 12 is formed on the first layer 12 in a thickness of 65nm by setting the flow rate of CH4 to 14SCCM and setting that of O2 to 6SCCM. The first layer 11 and the second layer 12 are changed in hydrocarbon in content by changing the flow rate ratio of the atmospheric gases CH4 and O2 on the surface of the substrate 10. By providing this structure to a recording layer, small bubbles having a uniform shape can be formed and, therefore, recording having a still more enhanced density can be also performed. |
