Device for the contactless scanning of a surface

摘要

The invention relates to a novel beam guidance in optical profilometers and ranging sensors (range finders) which measure in a contactless manner. After reflection at the surface, the scanning beam is immediately retroreflected into itself once again by a double-pass beam guide and passes for a second time over the surface. After the second reflection, the beam axis again runs back to the sensor in an antiparallel fashion relative to the direction of incidence. As a result, local profile gradients are compensated and faulty measurements and outliers in the measurement are prevented.