| 摘要 |
<p>A deflecting diaphragm differential pressure sensor (10) is formed so all electrical elements (30A-30D) and connections (34B) from external circuitry to the sensor (10) are isolated from the pressure media. The deflecting, pressure sensing diaphragm (22) is made of a semi-conductor material, having piezoresistors disposed on a surface (25) thereof to form strain gages to sense deflection of the diaphragm (22). The strain gage resistors are media isolated by a layer that overlies the strain gage resistors. All forms of the invention provide environmental protection for the electrical connections for external circuitry, which are subject to corrosion from the pressure media.</p> |
