Process for forming a master mold for optical storage disks
摘要
A method for forming a master mold for optical storage disks includes thermally growing an oxide or nitride layer on a semiconductor wafer. The thermally grown layer is then coated with a photoresist. The photoresist is exposed to a laser beam to form a data pattern and developed. The oxide or nitride under the developed pattern is etched and the photoresist stripped to provide a semiconductor master mold for optical disks.
申请公布号
US4724043(A)
申请公布日期
1988.02.09
申请号
US19860943845
申请日期
1986.12.24
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
BERGENDAHL, ALBERT S.;CADE, PAUL E.;GONNELLA, NORMAN T.;LUECKE, FRANCIS S.;PETERSEN, KURT E.