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发明名称
摘要
申请公布号
JPS6318834(U)
申请公布日期
1988.02.08
申请号
JP19860112024U
申请日期
1986.07.23
申请人
发明人
分类号
F04B37/16;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
F04B37/16
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代理人
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