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发明名称
PROCESSOR FOR WAFER
摘要
申请公布号
JPS6328037(A)
申请公布日期
1988.02.05
申请号
JP19860172382
申请日期
1986.07.22
申请人
NEC CORP
发明人
KAI MAKOTO
分类号
H01L21/302;H01L21/306
主分类号
H01L21/302
代理机构
代理人
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