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发明名称
GAP DETECTING METHOD FOR MASK FOR X-RAY EXPOSURE
摘要
申请公布号
JPS6326506(A)
申请公布日期
1988.02.04
申请号
JP19860170391
申请日期
1986.07.18
申请人
FUJITSU LTD
发明人
MARUYAMA SHIGERU;FUEKI SHUNSUKE;SUGISHIMA KENJI
分类号
G01B11/14
主分类号
G01B11/14
代理机构
代理人
主权项
地址
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