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经营范围
发明名称
CVD METHOD
摘要
申请公布号
JPS6326368(A)
申请公布日期
1988.02.03
申请号
JP19860170280
申请日期
1986.07.19
申请人
ULVAC CORP
发明人
KUSUMOTO TOSHIO;TAKAKUWA KAZUO;IKUTA TETSUYA;SUZUKI AKITOSHI;NAKAYAMA IZUMI
分类号
H01L21/285;C23C16/04;C23C16/08;H01L21/3205
主分类号
H01L21/285
代理机构
代理人
主权项
地址
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