发明名称 METHOD FOR FEEDING EVAPORATING SUBSTANCE IN VACUUM DEPOSITION APPARATUS
摘要 PURPOSE:To recover ineffective vapor and to improve the utilization efficiency of vapor by continuously feeding a strip-shaped evaporating substance to an evaporating vessel through the rear side of a material to be treated. CONSTITUTION:A strip-shaped evaporating substance 8 is continuously fed to an evaporating vessel 5 placed in a vacuum deposition tank 1 in accordance with the consumption of an evaporating substance 6 in the vessel 5. The substances 8, 6 are of the same kind. The substance 8 is fed to the vessel 5 through the rear side of a material 2 to be treated and vacuum deposition is carried out on the front side of the material 2.
申请公布号 JPS6326353(A) 申请公布日期 1988.02.03
申请号 JP19860168130 申请日期 1986.07.18
申请人 KAWASAKI STEEL CORP 发明人 KOBAYASHI YASUHIRO;IGUCHI MASAO;NISHIIKE UJIHIRO;SUJITA SHIGEKO;SUZUKI KAZUHIRO
分类号 C23C14/24 主分类号 C23C14/24
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