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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6317528(A)
申请公布日期
1988.01.25
申请号
JP19860161617
申请日期
1986.07.09
申请人
TOSHIBA CORP
发明人
KISHI KOICHI
分类号
H01L21/30;H01L21/302;H01L21/3065
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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