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发明名称
SUBSTRATE CONVEYING DEVICE
摘要
申请公布号
JPS6317715(A)
申请公布日期
1988.01.25
申请号
JP19860157841
申请日期
1986.07.07
申请人
HITACHI LTD
发明人
OKAWA HIROO;IWAKI KIYOE;FUJIMOTO MINORU
分类号
B65G25/04;B65H5/16
主分类号
B65G25/04
代理机构
代理人
主权项
地址
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