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发明名称
DEVICE FOR MANUFACTURING SEMICONDUCTOR
摘要
申请公布号
JPS6314424(A)
申请公布日期
1988.01.21
申请号
JP19860158536
申请日期
1986.07.04
申请人
MITSUBISHI ELECTRIC CORP
发明人
MINAMI SHINJI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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