发明名称 Photoresist compositions containing quinone sensitizer.
摘要 <p>Positive-working imaging compositions comprise a polymeric binder and a quinone sensitizer which provides alkali solubility to the composition when exposed to activating radiation.</p>
申请公布号 EP0253219(A2) 申请公布日期 1988.01.20
申请号 EP19870109532 申请日期 1987.07.02
申请人 EASTMAN KODAK COMPANY (A NEW JERSEY CORPORATION) 发明人 DOMINH, THAP;FLEMING, JAMES CHARLES;LINDSTROM, MICHAEL JEFFREY
分类号 G03C1/72;G03F7/004 主分类号 G03C1/72
代理机构 代理人
主权项
地址