| 摘要 |
PURPOSE:To precisely monitor the position and shape of laser light with an inexpensive mechanism by arranging a transparent glass sheet emitting fluorescence by the radiation of UV laser on the outside of a laser light outputting window, and providing an image pickup device capable of simultaneously catching the luminous image and the peripheral inclusions. CONSTITUTION:UV laser light 12 is passed through a reactor 2 in parallel with the surface of a sample 5 from an input window 9 in the laser CVD (chemical vapor deposition) device, and photochemical reaction is carried out on the plane of the sample 5. The transparent glass sheet 13 emitting fluorescence by the radiation of the UV laser light 12 is arranged on the outside of the output window 10 for introducing the laser light 12 to the outside of the reactor 2. Besides, the image pickup device 15 is arranged to catch the luminous image and the peripheral inclusions in the visual field. Since the laser light 12, the sample 5, and the peripheral inclusions can be observed by the same image surface of the monitor device 20 in this way, a change in the setting of a process parameter is facilitated, and the exposure to harmful UV rays can be prevented, since the observation is done by the monitor device 20. |
