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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPS6311672(A)
申请公布日期
1988.01.19
申请号
JP19860154387
申请日期
1986.06.30
申请人
NEC CORP
发明人
MATSUI SHINJI;MORI KATSUMI
分类号
H01L21/205;C23C16/04;C23C16/48;H01L21/285;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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