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发明名称
SEMICONDUCTOR CUTTER
摘要
申请公布号
JPS6311307(A)
申请公布日期
1988.01.18
申请号
JP19860156542
申请日期
1986.07.02
申请人
MITSUBISHI ELECTRIC CORP
发明人
KAMITAKI YUJI;NAKAYAMA OSAMU
分类号
H01L21/301;B28D5/00;H01L21/78
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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