| 摘要 |
PURPOSE:To form a multi-layered thin film which obviates cracking, etc., by compounding an org. metal compd. which yields the oxide of an alkali metal or alkaline earth metal by calcination with one of coated films at the time of alternately laminating the coated films contg. the org. metal compds. different from each other and calcining the same. CONSTITUTION:The multi-layered thin film is formed by alternately laminating the coated films contg. the org. metal compd. [for example, Si(OCH3)4, etc.] which yields a 1st metal oxide by calcination and the org. metal compd. [for example, Ti(OC3H7)4, etc.] which yields a 2nd metal oxide except said metal oxide and calcining the films. The org. metal compd. which yields at least either of the compds. of R2O (R is at least one of alkali metal among Li, Na, K, Rb, and Cs) and RO (R is at least one of alkaline earth metal among Be, Mg, Ca, Sr, and Ba) by calcination is compounded with the coated film contg. the org. metal compd. which yields the 1st metal oxide in such a manner that the content thereof is 1-25mol%. The multi-layered thin film which obviates the generation of troubles such as cracking and has high productivity is thus obtd. |
