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发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPS636831(A)
申请公布日期
1988.01.12
申请号
JP19860148248
申请日期
1986.06.26
申请人
TOSHIBA CORP
发明人
FUKUYAMA YOSHITAKA;IWASAKI HIDEO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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