| 摘要 |
PURPOSE:To contrive the reuse of a laser gas by absorbing humidity and regenerating the used laser gas in an oscillating container by filling in appropriate number of subtanks. CONSTITUTION:When a laser oscillation is finished in a day, the used laser gas in an oscillating container 3 is filled in a subtank 25 and the laser gas is regenerated in the subtank 25 until the reoscillation of the second day. In the case of the reoscillation on the second day, the regenerated laser gas in the subtank 25 is leaked for a set time into the oscillating container 3 by a timer. If the pressure in the oscillating container 3 is not increased to a limit, a new laser gas is supplemented for reoscillation by opening the first solenoid valve 11. In this way, the once used laser gas in the oscillating container is regenerated and reused everyday without abolishing. |
