| 摘要 |
PURPOSE:To reduce a mechanical motion part for scanning and to perform highly accurate photometry, by projecting the image of a light source body, wherein minute light sources are arranged in an array form unidimentionally or two-dimensionally, onto the surface of a specimen. CONSTITUTION:In a scanning type photometric microscope, an array type light source 1 is constituted so that LED displays are arranged in an array form unidimensionally or two-dimensionally. Optical fiber bundle 2 is constituted so that the optical fibers at one end thereof are opposed to LEDs of the light source 1 one at a time and those at the other end thereof are collected into one to form an array like light emitting surface (f). A condenser lens system C forms the contracted image of the light emitting surface (f) on a specimen S. When one of LEDs of the light source 1 is allowed to light, 1min point on the surface of the specimen S can be illuminated selectively. Therefore, when LEDs constituting the light source 1 are allowed to light one at a time in appropriate order by a scanning circuit 3 and a drive circuit 4, the same result as such a case that the surface of the specimen S is scanned by a light spot is obtained. The transmitted or reflected light of the specimen is received by an optical sensor R through an objective lens P and subjected to signal processing to be displayed on CRT. |
