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经营范围
发明名称
SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPS635513(A)
申请公布日期
1988.01.11
申请号
JP19860148862
申请日期
1986.06.25
申请人
MATSUSHITA ELECTRIC WORKS LTD
发明人
TANAKA YOSHIMITSU
分类号
H01L21/20;H01L21/205
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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