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经营范围
发明名称
INSPECTION APPARATUS
摘要
申请公布号
JPS635276(A)
申请公布日期
1988.01.11
申请号
JP19860146976
申请日期
1986.06.25
申请人
HITACHI TOKYO ELECTRON CO LTD;HITACHI LTD
发明人
TAKAGI SUSUMU;NAKAMURA KOJI
分类号
G01R31/26;G01R31/28
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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