发明名称 WIRE BONDER
摘要 PURPOSE:To avoid a discrepancy between a determined origin and a real center of turning by a method wherein coordinate values are obtained by calculating the center point between a predetermined target point on a pellet and a target point in the state after the pellet is turned 180 degrees and the center position of turning is corrected and determined with the obtained coordinate values. CONSTITUTION:First, the coordinate values (X1, Y1) of a predetermined point in a pattern 21a on a pellet 8 are read by a controller 12 under the condition that a registered pattern 21 and the pattern 21a coincide with each other while a product 2 is placed on a bonding stage 3. Then the bonding stage 3 is turned 180 degrees and, based upon the registered pattern 21 again, the pattern 21a on the pellet 8 which coincides with the registered pattern 21 is referred. Thus, under the condition that the registered pattern 21 and the pattern 21a on the pellet 8 coincide with each other, the coordinate values (X2, Y2) of a predetermined point are read by the controller 12. The controller 12 calculates the center point between the two points based upon the two sets of the coordinate values and the calculated point is determined as an origin.
申请公布号 JPS634639(A) 申请公布日期 1988.01.09
申请号 JP19860146973 申请日期 1986.06.25
申请人 HITACHI TOKYO ELECTRON CO LTD;HITACHI LTD 发明人 KONO TETSUYA;TAKASHIMA KAZUHISA
分类号 H01L21/60;H01L21/607 主分类号 H01L21/60
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