| 摘要 |
PURPOSE:To stabilize the jet capacity of a nozzle, by applying nickel plating treatment containing a tetrafluoride resin to the uppermost surface of an electrodeposition metal and subsequently peeling an electrodeposition substance from a substrate before removing a dry film resist. CONSTITUTION:A metal 4 coming to the substrate of a nozzle is applied to a substrate 1 around a resist pattern 3 by electrodeposition. In this case, electrodeposition is performed in a plating liquid having a composition based on nickel sulfamate but, after electrodeposition is performed so that the thickness of the metal 4 approaches the thickness of a dry film, electrodeposition is applied only to the uppermost surface of a nozzle substrate (plating layer)4 in a plating liquid having a tetrafluoride resin particle compounded therein to obtain an electrodeposition layer 5 having a thickness of about several mum. Thereafter, the nozzle part 4 is peeled from the glass substrate 1 and a dry film resist 3 is removed to form a nozzle wherein water repellency is imparted to the uppermost surface thereof. |
