| 摘要 |
PURPOSE:To obtain an Al film proof against acid and alkali by forming an Al film on a Cr-base film in the formation of a metallic film using Al. CONSTITUTION:A film 3 consisting of Cr, Cr alloy or metal in which either Cr or Cr alloy is a substantial alloy is formed on a solid PLZT substrate 2 by a vacuum deposition method, and an Al film 1 is formed on the film 3 by the same method. Cr 3 diffuses in the Al surface, and Pb, La, Zr and Ti which are the constituent substances of the substrate 2 also diffuse in the Al surface by the effect of the film 3, so Al is alloyed. The Al film is converted into a metallic film with high acid and alkali resistances. This metallic film is not corroded by chemicals during etching by a photolithographic method. |
